Slipping zones in microsystems for improved load support
1 : Fraunhofer IWM, MicroTribology Center μTC
Wöhlerstr. 11, D-79108 Freiburg -
Germany
2 : Albert-Ludwigs-University of Freiburg
Herrmann-Herder-Str. 3, D-79104 Freiburg -
Germany