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Slipping zones in microsystems for improved load support
1 : Fraunhofer IWM, MicroTribology Center μTC
Wöhlerstr. 11, D-79108 Freiburg -
Germany
2 : Albert-Ludwigs-University of Freiburg
Herrmann-Herder-Str. 3, D-79104 Freiburg -
Germany
| Subject : | : | oral |
| Topics | : | P5-3 Hydodynamics and thin films |
| Keywords | : | Wall slip ; Load carrying capacity ; MEMS |
| PDF version | : |  PDF version |
